- Nox Free Scrubber which can reduce emissions such as Nox, THC, etc.
- Model1000/2000_Nox Free
- Gas Process MethodBURN WET
- Processing capacityMax.500LPM(Based on single)
- Dimension(Cabinet)750(W)X850(D)X1800(H)_ECOBRID1000 / 1200(W)X1000(D)X1800(H)_ECOBRID2000
- It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them.
- Low NOX Burner : Reducing NOX, THC emissions(NOX Free)
- High processing efficiency of Flammable & Water-Soluble & PFC Gas
- Easy Maintenance, Easy PM, Cylinder Type
Possible processing GAS
- PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
- Flammable GAS : SiH4, DCS, TEOS, H2, PH3, ETC
- Water-Soluble GAS : Cl2, HF, HCl, NH3, ETC