본문 바로가기

Equipment Division

home > Equipment Division > SCRUBBER > BURN TYPE > VULCAN1000/2000
VULCAN1000/2000
Burn-Wet Scrubber, available for processing PFC gas and water-soluble gas.
  • ModelVULCAN1000/2000
  • Gas Process MethodBurn-Wet
  • Processing capacityMax 500LPM (Based on Single)
  • Dimension(Cabinet)900X800X1800 (VULCAN1000) / 1200X1000X1800 (VULCAN2000)
VULCAN1000/2000
It is an equipment that purifies Toxic Gas such as semiconductor, LCD, OLED, solar Cell
in the course of production process and emits them

Product Features

  • Safety System : Various Sensors (Smoke Sensor, UV Sensor)
  • Easy Maintenance System : Easy Chamber Cleaning
  • Energy Saving : Using Flame Control enables the saving of LNG & O2

Possible processing GAS

  • PFC Gas : NF3, SF6, CF4, C2F6, ETC.
  • Flammable Gas : SiH4, DCS, TEOS, ETC.
  • Water-Soluble Gas : HCl, BCl3, HF, ETC.