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TRITON

Maximizes the PM lifecycle with pre-processing effect for
water-soluble gas and powder by implementing pre-wet module

Gas Processing
WET BURN WET
Processing Capacity
Max.500LPM
Dimension
(Cabinet)
900(W)X1050(D)X1850(H)
Product Features
Pre-wet System: Extends primary water processing PM cycle
Step-by-step Flame Mode: Energy saving
High-speed Air Burner: maintain stable flame and emits low NOx
Scraper System: Prevents powder clogging
Compatible Gas
Flammable Gas : SiH4, DCS, TEOS, H2, PH3, ETC
Water-soluble Gas : DCS, NH3, ETC
Inquire

IGNIS

With the high-capacity concept, the model is compatible
with a high inflow of gas or H2; adapts NOx reduction Burner

Gas Processing
Burn-Wet
Processing Capacity
Max, 3000LPM
Dimension
(Cabinet)
Single(mm)1100 *100*1900 / Dual(mm) 1900*1300*1918
Product Features
High capacity processing available (up to 3000 LPM)
Dual System: Reduces equipment downtime through interconnection
Compatible Gas
PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
Flammable Gas : SiH4, DCS, TEOS, H2, PH3, ETC
Water-soluble Gas : Cl2, HF, HCl, NH3, ETC
Inquire

UN2005A-PL & PLD

High-capacity burn-wet scrubber enabled
to process large amount of gas

Gas Processing
High-capacity BURN WET
Processing Capacity
Max.1500LPM(Single)
Dimension
(Cabinet)
1200(W)X1100(D)X1700(H)_UN2005A-PL /
1500(W)X1300(D)X1850(H)_UN2005A-PLD
Product Features
High capacity processing available (up to 1500 LPM)
Dual System: Reduces equipment downtime through interconnection
Easy maintenance, easy PM, cylinder structure
Compatible Gas
PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
Flammable Gas : SiH4, DCS, TEOS, H2, PH3, ETC
Water-soluble Gas : Cl2, HF, HCl, NH3, ETC
Inquire

ECOBRID1000 & 2000

NOx-free scrubber capable of reducing NOx, THC, etc.

Gas Processing
BURN WET
Processing Capacity
Max.500LPM(Single)
Dimension
(Cabinet)
750(W)X850(D)X1800(H)_ECOBRID1000 /
1200(W)X1000(D)X1800(H)_ECOBRID2000
Product Features
Low NOx Burner: Reduce NOx and THC release (Nox-free)
High processing efficiency of flammable, water-soluble, and PFC gas
Easy maintenance, easy PM, cylinder structure
Compatible Gas
PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
Flammable Gas : SiH4, DCS, TEOS, H2, PH3, ETC
Water-soluble Gas : Cl2, HF, HCl, NH3, ETC
Inquire

NECA4000

Large-capacity burn-box type for display processes
(No Water Consumption)

Gas Processing
BURN WET (Box Type)
Processing Capacity
Max.6000LPM
Dimension
(Cabinet)
1800(W)X1300(D)X1800(H)
Product Features
Large processing capacity (MAX 6,000 LPM)
High processing efficiency for flammable and PFC gas
UT Reduction: CW is not used
Easy maintenance, easy PM, cylinder structure
Compatible Gas
PFC GAS : NF3, SF6, CF4, C2F6, C3F8, ETC
Flammable Gas : SiH4, DCS, TEOS, H2, PH3, ETC
Inquire