TOP
ARENS
Dry type resin scrubber
- Gas Processing
- Resin(chemicals)
- Processing Capacity
- 200LPM
- Dimension
(Cabinet)
- 870(W)X850(D)X1700(H)
- Product Features
-
Effective absorption of target gas using resin
Do not use CW (reduces UT)
Powder trap detachable structure
- Compatible Gas
-
Metal Etch : BCl3, Cl2, HCl, ETC
Implant : BF3, PH3, ETC
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